Within this paper, the new lapping slurry and sprucing slurry are introduced. As well as deliquescence degree of CLBO is fallen to most affordable. A completely new working technological innovation is additionally adopted. Just after rough sprucing, the concentration of extremely-precision polishing slurry is enhanced properly. So does the extremely-precision sharpening pace, plus the wiping velocity is quicker compared to deliquescence velocity. The CLBO crystal surface roughness can achieve 1nm and continue to keep the area good quality very well. Entry by means of your institution
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全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
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Because of the thermal lens effect during the stable-condition lasers, When the heating administration is inadequate, It's not at all straightforward to obtain the good-point out laser by using a higher ability plus a high beam good quality at the same time. Just lately, with the event of The skinny disk laser and single-crystal fiber (SCF) laser, a superior-electricity laser at the elemental wavelength (one μm) had been realized with an excellent beam excellent even with a TEM00 mode beam [4,24], which would be excellent candidates for the basic on the DUV laser era. A different prospect for the fundamental will read more be the higher-electrical power fiber laser which may be reached by coherent beam mixture with M2 value lower than one.
On the opposite aspect, the power scaling of the NIR laser is yet another facet to boost the normal electric power in the 193-nm DUV laser. As a result of deficiency of the large-power amplification Option from the NIR laser (one example is at 1553 nm), nonlinear frequency procedures which include optical parameter oscillation (OPO) might be placed on create a wavelength converter by shifting the wavelength from one μm to the specified wavelength along with acquiring relative better electric power [21]. A short while ago, a diamond Raman laser showed its capacity in reaching a large ability along with a large conversion performance in the 1st Stokes from the one-μm laser [22,23], which implies the possibility to be used while in the 193-nm DUV laser generation due to its high Raman get and huge frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the simplest non-linear crystal which generates ultraviolet harmonics with the Nd:YAG elementary laser wavelength. So as to boost the problems threshold, very low CLBO floor roughness, by ultra-precision machining, is necessary. Since the CLBO crystal has straightforward hydroscopic reaction and micro scratches in machining, extremely-precise machining of the CLBO crystal is usually a tricky technological dilemma.
The beam profile demonstrated in Determine 7b shown a good beam good quality as one of the merits of Raman laser, which might be beneficial to create a 193-nm DUV laser with a top quality beam.
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